ASTM F1238-95(1999)
Superseded , Confirmed Standard
Historical

ASTM F1238-95(1999)

Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications
Most recent standard

Summary

1.1 This specification covers sputtering targets fabricated from metallic silicides (molybdenum silicide, tantalum silicide, titanium silicide, and tungsten silicide). These targets are referred to as refractory silicide targets, and are intended for use in microelectronic applications.

1.2 The values stated in SI units are regarded as standard.

Technical characteristics

Publisher American Society for Testing and Materials (ASTM International)
Publication Date 01/01/1995
Confirmation Date 12/10/1999
Collection
Page Count 2
Themes Electronic tubes
EAN ---
ISBN ---
Weight (in grams) ---
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