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BS ISO 21859:2019
Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment
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Summary
Semiconductor manufacture;Components;Plasma;Test methods;Ceramics;Special ceramics
Technical characteristics
| Publisher | British Standards Institution (BSI) |
| Publication Date | 06/19/2019 |
| Page Count | 12 |
| Themes | Special ceramics |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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