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BS ISO 22278:2020
Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam
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Summary
Ceramics;Special ceramics;Test methods;Crystalline state;Quality;Thin films
Technical characteristics
| Publisher | British Standards Institution (BSI) |
| Publication Date | 08/26/2020 |
| Page Count | 38 |
| Themes | Thin films |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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