DIN 50441-5:1998-05
Superseded Standard
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DIN 50441-5:1998-05

Testing of materials for semiconductor technology - Determination of the geometric dimensions of semiconductor wafers - Part 5: Terms of shape and flatness deviation
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Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 05/01/1998
Page Count 8
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Weight (in grams) ---
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