DIN 50451-2:1990-10

Determination of cobalt, chromium, copper, iron and nickel as impurities in hydrofluoric acid for use in semiconductor technology by plasma-induced emission spectrometry

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Publisher	Deutsche Institut für Normung e.V. (DIN)
Publication Date	10/01/1990
Page Count	8
EAN	---
ISBN	---
Weight (in grams)	---

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DIN 50451-2:2003-04

Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 2: Calcium (Ca), cobalt (Co), chromium (Cr), copper (Cu), Iron (Fe), nickel (Ni) and zinc (Zn) in hydrofluoric acid with plasma-induced emission spectroscopy

01/04/2003

Withdrawn

Most Recent

DIN 50451-2:2002-01

Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 2: Calcium (Ca), Cobolt (Co), chromium (Cr), copper (Cu), iron (Fe), nickel (Ni) and zinc (Zn) in hydrofluoric acid with plasma-induced emission spectroscopy

01/01/2002

Superseded

Historical

DIN 50451-2:1990-10

Determination of cobalt, chromium, copper, iron and nickel as impurities in hydrofluoric acid for use in semiconductor technology by plasma-induced emission spectrometry

01/10/1990

Superseded

Historical

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