Superseded
Standard
Historical
DIN 50453-2:1990-10
Testing of materials for semiconductor technology; determination of etch rates of etching mixtures; silicium-dioxid coating; optical method
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Summary
The standard defines the test method for the determination of etch rates of etch mixtures on siliciumdioxid coatings.
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 10/01/1990 |
| Page Count | 2 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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