Superseded
Standard
Historical
DIN 50989-1:2018-03
Ellipsometry - Part 1: Principles; Text in German and English
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Summary
This standard deals with the ellipsometry, a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses, in the range of at-line production control, quality assurance and material development.
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 03/01/2018 |
| Page Count | 35 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
| Brochures |
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Previous versions
01/03/2018
Superseded
Historical
01/04/2017
Superseded
Historical