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Draft standard
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DIN EN 62047-21:2012-11
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials (IEC 47F/127/CD:2012)
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Summary
This International Standard specifies the determination of Poisson's ratio from uniaxial and biaxial tests of thin-film micro-electrical-mechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 11/01/2012 |
| Cancellation Date | 04/01/2015 |
| Page Count | 24 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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