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DIN EN ISO 14644-6:2007-10

Cleanrooms and associated controlled environments - Part 6: Vocabulary (ISO 14644-6:2007); Trilingual version EN ISO 14644-6:2007

Summary

This part of ISO 14644 is a compendium of terms and definitions used in ISO 14644-1, 14644-2, 14644-3, 14644-4, 14644-5, 14644-7, 14644-8, 14698-1 and 14698-2. Terms that have been revised from their original, published form in order to provide a standardized definition for the ISO 14644 and 14698 series are noted as ""adapted from.""

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 10/01/2007
Cancellation Date 04/01/2015
Page Count 59
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