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Standard
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DIN EN ISO 14644-6:2007-10
Cleanrooms and associated controlled environments - Part 6: Vocabulary (ISO 14644-6:2007); Trilingual version EN ISO 14644-6:2007
Summary
This part of ISO 14644 is a compendium of terms and definitions used in ISO 14644-1, 14644-2, 14644-3, 14644-4, 14644-5, 14644-7, 14644-8, 14698-1 and 14698-2. Terms that have been revised from their original, published form in order to provide a standardized definition for the ISO 14644 and 14698 series are noted as ""adapted from.""
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 10/01/2007 |
| Cancellation Date | 04/01/2015 |
| Page Count | 59 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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