Superseded
Draft standard
Historical
DIN IEC 62047-3:2004-08
Microelectromechanical devices - Part 3: Thin film standard test piece (IEC 47/1760/CD:2004)
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Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 08/01/2004 |
| Page Count | 8 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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Previous versions
01/08/2004
Superseded
Historical