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ISO 19606:2024

Fine ceramics (advanced ceramics, advanced technical ceramics)
Test method for surface roughness of fine ceramic films by atomic force microscopy

Summary

ISO 19606:2017 describes a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy, of surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, RSm, in the range of about 0,04 µm to 2,5 µm.

Notes

40.60 : Clôture du vote

Technical characteristics

Publisher International Organization for Standardization (ISO)
Publication Date 11/01/2024
Edition 2
Page Count 24
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Weight (in grams) ---