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ISO 23131-3:2025
Ellipsometry
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Summary
This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part e1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.
Notes
40.00 : DIS enregistré
Technical characteristics
| Publisher | International Organization for Standardization (ISO) |
| Publication Date | 12/17/2025 |
| Edition | 1 |
| Page Count | 29 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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