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ISO/DIS 25164:2025

Physical vapor deposition coatings — Magnetron sputtering deposition of TiAlSiN thin films — Specification

Summary

This document specifies the technical requirements for TiAlSiN thin films deposited by magnetron sputtering.

Notes

40.00 : DIS enregistré

Technical characteristics

Publisher International Organization for Standardization (ISO)
Publication Date 10/24/2025
Edition 1
Page Count 7
EAN ---
ISBN ---
Weight (in grams) ---
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