Superseded Standard
Historical

NBN EN ISO 14644-10:2013

Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013)

Summary

ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.

Technical characteristics

Publisher Bureau de Normalisation Belge (NBN)
Publication Date 05/31/2013
Cancellation Date 09/30/2013
Page Count 44
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