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NBN EN ISO 25178-603:2013
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments (ISO 25178-603:2013)
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Summary
ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
Technical characteristics
| Publisher | Bureau de Normalisation Belge (NBN) |
| Publication Date | 12/19/2013 |
| Cancellation Date | 04/30/2014 |
| Page Count | 42 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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