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NBN EN ISO 25178-604:2013

Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments (ISO 25178-604:2013)

Summary

ISO 25178-604:2013 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.

Technical characteristics

Publisher Bureau de Normalisation Belge (NBN)
Publication Date 10/25/2013
Cancellation Date 02/28/2014
Page Count 56
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