NBN ISO 16700:2023
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NBN ISO 16700:2023

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification

Summary

ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.

Technical characteristics

Publisher Bureau de Normalisation Belge (NBN)
Publication Date 11/22/2023
Page Count 28
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