VDI 2083 Blatt 16.2:2021-04

This standard applies to all types of mini-environments for the separation of defined clean environments in technical areas. This standard applies but to gaseous media such as air and inert gases in a mini-environment. It does not apply to vacuum processes or liquid process media. Only airborne contamination is addressed, i.e. the carrier medium is, as a rule, air (or, in special cases, a protective atmosphere, like an inert gas). The growth of contaminants through leaks or weaknesses is not considered.