VDI 2083 Blatt 4.2:2011-04 (R2016)

This guideline deals with cleanroom-specific energy-saving potentials. Processes in the cleanroom are considered only in terms of their interfacing with cleanroom-specific building services. By way of example, the guideline considers the energy-saving potential for utrapure steam. Evidently, the architecture of the building, the building services for the environment around the cleanroom, the centalised energy supply for the building and any option for recovering energy are part of a holistic consideration of energy saving. These areas have been dealt with comprehensively in other technical rules (such as VDI 2067, VDI 3807, DIN V 18599) and are thus only addressed in terms of their interfacing with the cleanroom.