Superseded Standard
Historical

VDI 2083 Blatt 7:2006-11

Cleanroom technology - Cleanliness of process media

Summary

The cleaning of process media is an element of clean processing. The level of cleanliness of process media depends on a multitude of potential contamination sources. This part of the guideline VDI 2083 primarily assesses the influence of particulate contamination. Particulate contamination of products manufactured in clean rooms is not subject of this guideline.

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 11/01/2006
Cancellation Date 10/01/2015
Page Count 31
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