VDI 2083 Blatt 8.1:2009-07

This guideline deals with the control and determination of chemical contamination in cleanrooms in order to protect process, product and personnel. It specifies general principles for the treatment, handling, avoidance and reduction of chemical contamination in cleanrooms. These principles are based on the performance characteristics of established and available technical solutions and the economic characteristics of these solutions. The fact that media other than air can also bear contaminations in the form of AMC which affect processes, products and personnel shall be noted expressly. This is particularly true for water, aqueous solutions, further process liquids and process gases. The chemical contamination of these media has impacts in all producing industries concerned, such as the semiconductor, optical, food and luxury food, pharmaceutical, genetic- and medical-engineering industries. Molecular contamination in liquid and gaseous process media, however, is not within the scope of this guideline. The scope of this guideline includes all production and storage areas of the industries concerned, which are subject to cleanroom conditions, where products and processes can be affected by AMC.