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VDI/VDE 3717 Blatt 10:1993-03

Mask engineering; masks for integrated optics

Summary

This document is inteded to simplify the cooperation between mask manufacturer and user of integrated optical circuits by providing definitions (based on definitions used in DIN VDE 0888) and specifications.

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 03/01/1993
Cancellation Date 05/01/2015
Page Count 10
EAN ---
ISBN ---
Weight (in grams) ---
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