ASTM F1709-97
Superseded Standard
Historical

ASTM F1709-97

Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications
Most recent standard

Summary

1.1 This specification covers pure titanium sputtering targets used as a raw material in fabricating semiconductor electronic devices.

1.2 This standard sets purity grade levels, physical attributes, analytical methods, and packaging.

Technical characteristics

Publisher American Society for Testing and Materials (ASTM International)
Publication Date 01/01/1996
Collection
Page Count 3
Themes Electronic display devices
EAN ---
ISBN ---
Weight (in grams) ---
No products.

Previous versions

Contact us