DIN 50441-4:1997-11
Superseded Draft standard
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DIN 50441-4:1997-11

Testing of materials for semiconductor technology - Determination of the geometric dimensions of semiconductor wafers - Part 4: Slice diameter, diameter variation, flat diameter, flat length, flat depth
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Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 11/01/1997
Page Count 8
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