Superseded
Standard
Historical
VDI/VDE 2655 Blatt 1.1:2005-04
Optical measurement and microtopographies - Calibration of interference microscopes and depth measurement standards for roughness measurement
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Summary
This part deals with the basic calibration of interference microscopes which is linked with measurement at plane surfaces and at flat surfaces.
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 04/01/2005 |
| Cancellation Date | 03/01/2008 |
| Page Count | 38 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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