29 : Electrical engineering

29.045 : Semiconducting materials

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DIN SPEC 1994:2016-07

DIN SPEC 1994:2016-07

Superseded Historical

Testing of materials for semiconductor technology - Determination of anions in weak acids

€45.05

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DIN 50451-5:2010-03

DIN 50451-5:2010-03

Superseded Historical

Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 5: Guideline for the selection of materials and testing of their suitability for apparatus for sampling and sample preparation for the determination of trace elements in the range of micrograms per kilogram and nanograms per kilogram

€56.17

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DIN 50451-3:2012-11

DIN 50451-3:2012-11

Superseded Historical

Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 3: Aluminium (Al), Arsenic (As), Barium (Ba), Beryllium (Be), Bismuth (Bi), Calcium (Ca), Cadmium (Cd), Cobalt (Co), Chromium (Cr), Copper (Cu), Iron (Fe), Gallium (Ga), Germanium (Ge), Hafnium (Hf), Indium (In), Potassium (K), Lithium (Li), Magnesium (Mg), Manganese (Mn), Molybdenum (Mo), Nickel (Ni), Niobium (Nb), Lead (Pb), Antimony (Sb), Tin (Sn), Strontium (Sr), Tantalum (Ta), Titanium (Ti), Vanadium (V), Zinc (Zn), Zirconium (Zr) in nitric acid by ICP-MS

€77.20

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DIN 50451-6:2012-11

DIN 50451-6:2012-11

Superseded Historical

Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 6: Determination of 36 elements in a high-purity ammonium fluoride solution (NHF) and in etching mixtures of high-purity ammonium fluoride solution containing hydrofluoric acid

€63.27

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DIN 50450-9:2003-04

DIN 50450-9:2003-04

Superseded Historical

Testing of materials for semiconductor technology - Determination of impurities in carrier gases and dopant gases - Part 9: Determination of oxygen, nitrogen, carbonmonoxide, carbondioxide, hydrogen and C-C-hydrocarbons in gaseous hydrogen chloride by gaschromatography

€34.30

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DIN 50451-1:2003-04

DIN 50451-1:2003-04

Withdrawn Most Recent

Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 1: Silver (Ag), gold (Au), calcium (Ca), copper (Cu), iron (Fe), potassium (K) and sodium (Na) in nitric acid by AAS

€41.78

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DIN 50451-2:2003-04

DIN 50451-2:2003-04

Withdrawn Most Recent

Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 2: Calcium (Ca), cobalt (Co), chromium (Cr), copper (Cu), Iron (Fe), nickel (Ni) and zinc (Zn) in hydrofluoric acid with plasma-induced emission spectroscopy

€41.78

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DIN 50451-3:2003-04

DIN 50451-3:2003-04

Superseded Historical

Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 3: Aluminium (Al), cobalt (Co), copper (Cu), sodium (Na), nickel (Ni) and zinc (Zn) in nitric acid by ICP-MS

€41.78

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DIN 50451-4:2007-02

DIN 50451-4:2007-02

Superseded Historical

Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 4: Determination of 34 elements in ultra pure water by mass spectrometry with inductively coupled plasma (ICP-MS)

€63.27

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DIN 50455-1:2009-10

DIN 50455-1:2009-10

Active Most Recent

Testing of materials for semiconductor technology - Methods for characterizing photoresists - Part 1: Determination of coating thickness with optical methods

€41.78

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DIN 50452-2:2009-10

DIN 50452-2:2009-10

Active Most Recent

Testing of materials for semiconductor technology - Test method for particle analysis in liquids - Part 2: Determination of particles by optical particle counters

€56.17

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DIN SPEC 1994:2017-02

DIN SPEC 1994:2017-02

Active Most Recent

Testing of materials for semiconductor technology - Determination of anions in weak acids

€45.05

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DIN 50451-7:2017-02

DIN 50451-7:2017-02

Superseded Historical

Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 7: Determination of 31 elements in high-purity hydrochloric acid by ICP-MS

€63.27

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DIN 50451-7:2017-09

DIN 50451-7:2017-09

Superseded Historical

Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 7: Determination of 31 elements in high-purity hydrochloric acid by ICP-MS

€63.27

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DIN 50451-7:2018-04

DIN 50451-7:2018-04

Active Most Recent

Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 7: Determination of 31 elements in high-purity hydrochloric acid by ICP-MS

€63.27

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